Influence of the model of elastic ion-atomic collisions on the cumulants of the spatial distribution of implanted ions

Cumulants of the spatial distribution function of ions implanted in solid have been calculated. Equation for distribution function takes into account a finite ion path between of elastic collisions with the target atoms. Comparison with results of Lindhard-Scharff-Schiott theory shown that cumulants of these distributions are differ each from other for ions energies lower than a few hundred keV, and at higher energies they are coincide. This is due to the small length of ion path between collisions in compared with its longitudinal and lateral stragglings.