Microsecond ultra-high speed ellipsometry measurement technology based on differential evolutionary algorithm
Authors
- Zhibin Wang (ORCID: https://orcid.org/0000-0001-8610-1440)
- Peng Xue (ORCID: https://orcid.org/0000-0003-3981-117X)
- XU Chengyu
- Rui Zhang (ORCID: https://orcid.org/0000-0002-8729-8393)
- WANG Saifei
Publication Details
- Journal
- Journal of Applied Optics
- Published
- 2025-01-01
- DOI
- https://doi.org/10.5768/jao202546.0403006
- Primary Topic
- Advanced Measurement and Detection Methods
- Type
- article
- Field-Weighted Citation Impact
- 0.00