Langmuir Probe Measurements: The Electron Diffusion Parameter Under Collisional Near‐Probe Space Charge Layer Conditions

ABSTRACT The corrections which are necessary in the determination of the Electron Energy Distribution Function (EEDF) by means of Langmuir probe under near‐probe space‐charge layer conditions are investigated. Exact calculations of the first and second derivative function of the I(V) probe characteristic are given and approximations are used to determine the electron diffusion parameter (sink parameter) and consequently the EEDF. The results obtained using these different approximations are discussed and compared with those obtained using other methods reported in the literature.