Raman Spectral Data–Driven Analysis of Diamond-like Carbon Films Deposited Using the Radio-frequency Plasma-enhanced Chemical Vapor Deposition Method

Herein, spectral data–driven approaches were applied to analyze the carbon structure of diamond-like carbon (DLC) films deposited by the radio-frequency plasma-enhanced chemical vapor deposition and predict their properties. The correlation between the carbon structure and the film properties was further elucidated by combining an automated five-peak Raman deconvolution with heatmap visualization. Furthermore, the accuracy of film density predictions using partial least squares regression was profoundly improved through a variable selection method based on five-peak deconvolution analysis. These results demonstrate the effectiveness of this spectral data–driven approach in the research and development of DLC films, paving the way for their further improvements and broad applications