Design and Fabrication of a Reusable Ag-Based SERS Substrate

本研究针对现有表面增强拉曼散射(SERS)基底存在的一次性使用、环境要求严格、加工工艺复杂等问题，开发了一种基于扫描探针光刻(SPL)技术的可重复使用、灵敏度较高的Ag SERS基底。通过金刚石针尖的刻划结合所设计的加工轨迹，系统研究了法向载荷、间距、周期等参数对银表面微纳结构形成的影响，筛选出最佳SERS基底制备条件。结果表明，该方法可适用于金、银、铜等软金属，且在相同加工参数下，银基底的拉曼检测限显著优于金或铜基底。通过表面清洁和氧化层去除工艺，实现了Ag SERS基底的重复利用。本研究为低成本、高性能SERS基底的制备提供了新的参考。This study develops a novel reusable and highly sensitive Ag SERS substrate based on scanning probe lithography (SPL) technology to address the problems of existing surface-enhanced Raman scattering (SERS) substrates, including single-use nature, stringent environmental requirements, and complex fabrication protocols. Through the inscription of diamond tip-mediated mechanical machining combined with the designed processing trajectory, the impacts of parameters such as normal load, spacing, and period on the formation of micro- and nanostructures on Ag surfaces were systematically investigated to identify optimal preparation conditions for SERS substrate. The results show that the method can be applied to soft metals such as Au, Ag, Cu, etc., and the Raman detection limit of the Ag substrate is significantly better than that of the Au or Cu substrate under the same processing parameters. The reuse of the Ag SERS substrate was achieved via surface cleaning and oxide layer removal. This study provides a new reference for fabricating low-cost and high-performance SERS substrates.