Analysis of dark-field imaging mechanism in LPDI system based on coherence length control and point spread function approximation

This paper investigates the dark-field imaging mechanism of the Line-scan Phase Differential Imaging (LPDI) system based on coherence length control and point spread function (PSF) approximation. By establishing quantitative relationships between line-source geometric parameters and coherence length, and combining them with a sinc-function discretization model of PSF, the amplification mechanism of phase gradient signals is revealed. Experiments demonstrate that the LPDI system can image and detect phase gradients at the 100 nm level in large-aperture optics (over 400mm) with a resolution of 50 μm, thereby validating the accuracy of the theoretical model and the high sensitivity of the system.

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Publication Details

Published
2025-07-24
DOI
https://doi.org/10.1117/12.3069034
Primary Topic
Optical Systems and Laser Technology
Type
article
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Analysis of dark-field imaging mechanism in LPDI system based on coherence length control and point spread function approximation

Xiling Xiao, Guiyun Ye, Xu Ding, Zhonghai Zhang
Optical Systems and Laser Technology
article

Analysis of dark-field imaging mechanism in LPDI system based on coherence length control and point spread function approximation

Xiling Xiao, Guiyun Ye, Xu Ding, Zhonghai Zhang
article en

Abstract

This paper investigates the dark-field imaging mechanism of the Line-scan Phase Differential Imaging (LPDI) system based on coherence length control and point spread function (PSF) approximation. By establishing quantitative relationships between line-source geometric parameters and coherence length, and combining them with a sinc-function discretization model of PSF, the amplification mechanism of phase gradient signals is revealed. Experiments demonstrate that the LPDI system can image and detect phase gradients at the 100 nm level in large-aperture optics (over 400mm) with a resolution of 50 μm, thereby validating the accuracy of the theoretical model and the high sensitivity of the system.

Openalex Percentile: Top 84%
Optical Systems and Laser Technology
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