Quantitative analyses of microstructural alterations in titania by micro-Raman spectroscopy

Abstract In this study, we calibrated the variations of Raman bands for a series of anatase and rutile mixtures, and established two new algorithms to enable an efficient and quantitative analysis of the constituent phases in titania by using Raman spectroscopy. Accordingly, an exemplary quantitative analysis of the effects of fabrication temperature and heteroatom Cu doping on the generated phases in TiO 2 films grown by metal–organic decomposition method was performed. The related mechanisms were clarified based on the phase thermal stability and the effects of generated defects, in particular, oxygen vacancy, which confirmed the applicability of the proposed method for quantitative microstructural analysis in titania.