A cantilever-design standing wave linear piezoelectric motor operable across low and ultrasonic frequencies

Abstract This paper presents a novel cantilever-type standing wave piezoelectric motor (CT-SWPM) designed to offer a remarkable combination of precision and speed, operating at two distinct frequencies: low frequency (11.6 kHz) and ultrasonic frequency (38.9 kHz). This dual-frequency nature makes the piezoelectric motor a strong contender for future innovations in piezo-actuated systems. Two ceramic actuators with an output head were utilized to get the forward and backward motion of the stage. Electrode configuration technique (ECT) and resonance conditions were utilized to enhance the output performance of the piezoelectric motor. The maximum deflection of the ceramic actuator was obtained at its extreme free end, thus serving as a contact point between the stator and the stage. Driving this system at ultrasonic frequency provides higher speed and better resolution than low-frequency operation, making it ideal for precision tasks at micro and nano-scale operations. The minimum step displacement achieved by the motor is 98 nanometers at the ultrasonic frequency, whereas at the lower frequency, the smallest observed step displacement is approximately 400 nanometers. The currently developed linear piezoelectric motor can produce stage speeds of 21.1 mm s −1 and 171 mm s −1 at 11.6 and 38.9 kHz, respectively, at an applied voltage of 160 Vpp. Simulation software, Ansys Workbench, was utilized to perform finite element analysis of the actuator, and shows strong consistency with experimental data.