A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1

Fused silica, renowned for its excellent mechanical properties and thermal stability, has emerged as an ideal material for microelectromechanical system (MEMS) gyroscopes. However, the planar microfabrication of fused silica remains a widely recognized challenge that has long hindered the advancement of related devices. In this study, we present a novel planar processing technique for fused silica MEMS gyroscopes based on laser-induced assisted etching (LIAE). Using this method, we successfully fabricated a vibrating ring gyroscope (VRG) structure with an aspect ratio exceeding 50:1. Characterization results show that the device exhibits a resonant frequency of approximately 15.9 kHz and achieves a quality factor exceeding 200,000 under a vacuum condition of 0.1 Pa, indicating exceptional resonant performance. This technique enables the realization of high-performance fused silica MEMS gyroscopes and provides a promising fabrication pathway for other MEMS devices requiring ultra-high aspect ratio structures. [2025-0101]