Photonic Integrated Circuit (PIC)-based Sin-Sin2 Frequency Discriminator (FD) filter for 5G Application: SEM Engineering Analysis

We report the fabrication, testing, performance, and engineering device analysis of a Photonic Integrated Circuit (PIC)-based Linearized Optical Frequency Discriminator filter (LOFD) intended for 5G application using Scanning Electron Microscope (SEM) images. The device was fabricated using electron beam lithography. Besides the positive results, we also discuss the engineering analysis of the structural errors in the chip due to (i) waveguide gap and (ii) waveguide discontinuity in some areas of the Photonic chip.