Nondestructive characterization of nano-sized absorbing defects within laser devices using AFM-IR
Fabrication-induced absorbing defects can significantly degrade device performance. In this study, AFM-IR was employed to successfully characterize defects as small as 50 nm and identify multiple substances within the same region.
Authors
- Shenghuan Fang (ORCID: https://orcid.org/0009-0003-7733-1393)
- Hongfei Jiao (ORCID: https://orcid.org/0000-0003-2331-9420)
- Z. H. Lu (ORCID: https://orcid.org/0000-0001-8604-2479)
- Xinbin Cheng (ORCID: https://orcid.org/0000-0002-3855-483X)
- Jinlong Zhang (ORCID: https://orcid.org/0000-0002-1334-6436)
- Zhanshan Wang (ORCID: https://orcid.org/0000-0002-2161-6934)
- Binbin Jiang (ORCID: https://orcid.org/0000-0002-1832-9213)
Institutions
- Tongji University (CN)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.me.6
- Primary Topic
- Near-Field Optical Microscopy
- Type
- article
- Field-Weighted Citation Impact
- 0.00