Fabrication of the Film with Low-refractive Index and Low-scattering for Anti-reflective Coating
Porous silica thin film bearing low refractive index was successfully prepared using the sol-gel method. By careful selection of raw materials, thin films with both a low refractive index and low scattering can be fabricated.
Authors
- Ryoko Suzuki (ORCID: https://orcid.org/0000-0002-4101-2118)
Institutions
- Nikon (Japan) (JP)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.tha.6
- Primary Topic
- Optical Coatings and Gratings
- Type
- article
- Field-Weighted Citation Impact
- 0.00