Nano-Imprint Lithography of Metal-Oxides: Materials and Nano-Fabrication Methods for Photonic Meta-surfaces
We provide a complete description of sol-gel-based inorganic coatings production, deposition as thin films, and their direct nano-imprint to create photonic metasurfaces for structural colours (TiO 2 ) and anti-reflection coating (SiO 2 ).
Authors
- Badre Kerzabi
- Nicoletta Granchi (ORCID: https://orcid.org/0000-0001-7000-7484)
- David Grosso (ORCID: https://orcid.org/0000-0002-9156-6848)
- Laurent Gallais (ORCID: https://orcid.org/0000-0002-6806-4313)
- Mohammed Bouabdellaoui (ORCID: https://orcid.org/0000-0003-0980-4104)
- Elie A. Daher (ORCID: https://orcid.org/0000-0003-0388-5900)
- Marco Abbarchi (ORCID: https://orcid.org/0000-0002-2760-4766)
- Antony Gourdin
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université de Toulon (FR)
- Aix-Marseille Université (FR)
- Nello Carrara Institute of Applied Physics (IT)
- Délégation Provence et Corse (FR)
- Centrale Méditerranée (FR)
- Astronomy and Space (AU)
- Centre Interdisciplinaire de Nanoscience de Marseille (FR)
- University of Florence (IT)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.td.2
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00