Development of an IBS coating system for optics with a diameter of 2 meters
An upscaling concept of the ion beam sputtering process for large area optics is presented with a novel approach including a movable ion and deposition material source. First deposited single layers show promising results.
Authors
- Tarik Kellermann (ORCID: https://orcid.org/0009-0009-2031-5556)
- Andreas Wienke (ORCID: https://orcid.org/0000-0002-8927-6534)
- K. Starke
- Morten Steinecke (ORCID: https://orcid.org/0000-0002-4124-3039)
- Marco Jupé
- Detlev Ristau (ORCID: https://orcid.org/0000-0002-1778-1945)
Institutions
- Leibniz University Hannover (DE)
- Laser Zentrum Hannover (DE)
- L3S Research Center (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.mc.2
- Primary Topic
- Optical Coatings and Gratings
- Type
- article
- Field-Weighted Citation Impact
- 0.00