Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection

Gravitational wave detectors rely on low mechanical and optical loss mirror coatings. This work discusses optical losses through absorption and light scattering mechanisms in SiN x and SiO x N y coatings deposited by plasma-enhanced chemical vapour deposition.

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Published
2025-01-01
DOI
https://doi.org/10.1364/oic.2025.fa.9
Primary Topic
Surface Roughness and Optical Measurements
Type
article
Field-Weighted Citation Impact
0.00

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article

Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection

Anne-Sophie Munser, Simon Bublitz, Des Gibson, Kirstin Saunders et al.
Surface Roughness and Optical Measurements
article

Study of Optical Losses in SiNx and SiOxNy Coatings Deposited by Plasma-enhanced Chemical Vapour Deposition for Gravitational Wave Detection

Anne-Sophie Munser, Simon Bublitz, Des Gibson, Kirstin Saunders, Christian Mühlig, Sven Schröder, Caspar Clark, Tobias Herfurth
article en

Abstract

Gravitational wave detectors rely on low mechanical and optical loss mirror coatings. This work discusses optical losses through absorption and light scattering mechanisms in SiN x and SiO x N y coatings deposited by plasma-enhanced chemical vapour deposition.

Fraunhofer Institute for Applied Optics and Precision Engineering (DE), Helia Photonics (United Kingdom) (GB), University of Glasgow (GB), University of the West of Scotland (GB)
University of Glasgow, Science and Technology Facilities Council
Openalex Percentile: Top 81%
Surface Roughness and Optical Measurements
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