Influence of different impurities on ion-beam sputtered UV-coatings

The influence of different impurities on ion beam sputtered thin film materials for optical coatings is investigated. Emphasis is given to materials that are typically used for the ion optics of gridded RF-sources.

Authors

Matthias Falmbigl
Jason George
Binyamin Rubin
Antonio Checco

Institutions

Veeco (United States) (US)

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/oic.2025.me.9
Primary Topic: Ion-surface interactions and analysis
Type: article
Field-Weighted Citation Impact: 0.00

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article

Influence of different impurities on ion-beam sputtered UV-coatings

Matthias Falmbigl, Jason George, Binyamin Rubin, Antonio Checco

Jan 1, 2025

Ion-surface interactions and analysis

article

Influence of different impurities on ion-beam sputtered UV-coatings

Matthias Falmbigl, Jason George, Binyamin Rubin, Antonio Checco

January 1, 2025article en

Abstract

Veeco (United States) (US)

Openalex Percentile: Top 81%

Ion-surface interactions and analysis

DOI Source OpenAlex

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Influence of different impurities on ion-beam sputtered UV-coatings — Matthias Falmbigl, Jason George, et al. · (2025) | TGRS Research Map | TGRS