Determination of Layer Thickness During Double-side Coating
Optical interference coatings are often applied on both sides of a substrate. We show an adaption of broad band monitoring of layer thickness for coating machines that allow simultaneous stack deposition.
Authors
- Stefan Bruns (ORCID: https://orcid.org/0000-0002-9595-4485)
- Michael Vergöhl
- Michael Schneider (ORCID: https://orcid.org/0000-0001-9645-1938)
- Thomas Melzig (ORCID: https://orcid.org/0000-0002-6957-6548)
- Philipp Farr
- Bernd Galonska
Institutions
- Fraunhofer Institute for Surface Engineering and Thin Films (DE)
- Von Ardenne (Germany) (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.tc.5
- Primary Topic
- Metal and Thin Film Mechanics
- Type
- article
- Field-Weighted Citation Impact
- 0.00