Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces

A new spatially resolved scatterometer designed for the recording of up to 400 000 elementary BRDF for a single optical component is presented. It allows quantifying the weight of defects and contamination in the scattering losses.

Authors

Michel Lequime (ORCID: https://orcid.org/0000-0002-2527-5663)
Adrien Bolliand (ORCID: https://orcid.org/0000-0001-9864-0767)
Myriam Zerrad (ORCID: https://orcid.org/0000-0001-8365-3848)
C. Amra

Institutions

Centrale Méditerranée (FR)

Publication Details

Published: 2025-01-01
DOI: https://doi.org/10.1364/oic.2025.we.8
Primary Topic: Surface Roughness and Optical Measurements
Type: article
Field-Weighted Citation Impact: 0.00

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article

Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces

Michel Lequime, Adrien Bolliand, Myriam Zerrad, C. Amra

Jan 1, 2025

3 links

Surface Roughness and Optical Measurements

article

Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces

Michel Lequime, Adrien Bolliand, Myriam Zerrad, C. Amra

January 1, 2025article en

Abstract

Centrale Méditerranée (FR)

Openalex Percentile: Top 81%

Surface Roughness and Optical Measurements

DOI Source OpenAlex

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Quantitative Scatterometry: Mapping Defects and Contamination on Optical Surfaces — Michel Lequime, Adrien Bolliand, et al. · (2025) | TGRS Research Map | TGRS