Relationship Between Synthesis Parameters, In-Situ Stress, and Optical Surface Quality of AgAl Thick Films

AgAl alloys were magnetron sputtered at various working pressures while monitoring in-situ residual stress. Using cross-sectional TKD and surface optical measurements, the deposition parameters yielding the best optical and stress performance are identified and discussed.

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Published
2025-01-01
DOI
https://doi.org/10.1364/oic.2025.thd.6
Primary Topic
ZnO doping and properties
Type
article
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article

Relationship Between Synthesis Parameters, In-Situ Stress, and Optical Surface Quality of AgAl Thick Films

Kelsey A. Folgner, James D. Barrie, Chelsea D. Appleget, In‐Tae Bae et al.
4 links
ZnO doping and properties
article

Relationship Between Synthesis Parameters, In-Situ Stress, and Optical Surface Quality of AgAl Thick Films

Kelsey A. Folgner, James D. Barrie, Chelsea D. Appleget, In‐Tae Bae, Christopher J. Panetta, Scott D. Sitzman, Vania Jiao
article en

Abstract

AgAl alloys were magnetron sputtered at various working pressures while monitoring in-situ residual stress. Using cross-sectional TKD and surface optical measurements, the deposition parameters yielding the best optical and stress performance are identified and discussed.

The Aerospace Corporation (US)
Openalex Percentile: Top 87%
ZnO doping and properties
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Relationship Between Synthesis Parameters, In-Situ Stress, and Optical Surface Quality of AgAl Thick Films — Kelsey A. Folgner, James D. Barrie, et al. · (2025) | TGRS Research Map | TGRS