Characterization of PARMS Produced 1-μm thick Ta2O5 and SiO2 Monolayers in 0.35-5 μm Spectral Range
Layer materials combination Ta 2 O 5 /SiO 2 is widely used for production of optical coatings in the broadband spectral ranges. Optical properties of PARMS produced monolayers were characterized based on spectral and ellipsometric data using two software tools.
Authors
- Michael K. Trubetskov (ORCID: https://orcid.org/0000-0003-1490-0264)
- Tatiana Amochkina
- Vesna Janicki (ORCID: https://orcid.org/0000-0001-5066-7688)
- Nadzeya Khinevich
- Jordi Sancho‐Parramon (ORCID: https://orcid.org/0000-0003-3284-8666)
- А. С. Мысливец
Institutions
- Applied Photonics (United Kingdom) (GB)
- Max Planck Institute of Quantum Optics (DE)
- Ruđer Bošković Institute (HR)
- Max Planck Computing and Data Facility (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.tb.7
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00