Phase-shift interferometer measurement of anisotropic stress in wide bandgap Zirconium oxide thin films
A self-made phase-shift interferometer with the 3% measured error was used to measure the anisotropic stresses of zirconium oxide (ZrO 2 ) film. The minimum principle and shearing stresses at are -82.98 and 26.79 MPa, respectively.
Authors
- T.X. Li
- Kun-Hong Chen
- Hsi-Chao Chen (ORCID: https://orcid.org/0000-0001-7583-7313)
- Horng‐Chih Lin (ORCID: https://orcid.org/0000-0003-0662-9435)
- Yu‐Wei Chang (ORCID: https://orcid.org/0000-0002-6278-8273)
- Z. R. Hong
- Guanghui Su
Institutions
- National Yunlin University of Science and Technology (TW)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.wd.7
- Primary Topic
- Optical measurement and interference techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00