Ion Beam Sputter Deposition of Low Loss Optical Coatings on Large Substrates

Recent applications of high energy lasers have created a demand for large area complex coatings with low absorption and high LIDT on meter scale mirrors. We describe system design considerations and results for production of such coatings.

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Publication Details

Published
2025-01-01
DOI
https://doi.org/10.1364/oic.2025.mc.1
Primary Topic
Semiconductor materials and devices
Type
article
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article

Ion Beam Sputter Deposition of Low Loss Optical Coatings on Large Substrates

Eric Baltz, Ramin Lalezari, Howard Champoux, Zach Gerig
Semiconductor materials and devices
article

Ion Beam Sputter Deposition of Low Loss Optical Coatings on Large Substrates

Eric Baltz, Ramin Lalezari, Howard Champoux, Zach Gerig
article en

Abstract

Recent applications of high energy lasers have created a demand for large area complex coatings with low absorption and high LIDT on meter scale mirrors. We describe system design considerations and results for production of such coatings.

Optics Technology (United States) (US)
Openalex Percentile: Top 84%
Semiconductor materials and devices
DOISourceOpenAlex
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Ion Beam Sputter Deposition of Low Loss Optical Coatings on Large Substrates — Eric Baltz, Ramin Lalezari, et al. · (2025) | TGRS Research Map | TGRS