Submicrometer Defect Detection and Classification by Angle Resolved Light Scattering
Angle resolved light scattering is used to analyze sub-micron defects in coatings to improve performance and stability of optical components for high power laser applications.
Authors
- Anne-Sophie Munser
- Andreas Tünnermann (ORCID: https://orcid.org/0000-0003-4018-7626)
- Tobias Herffurth
- Th. Gischkat
- Shuo Ma (ORCID: https://orcid.org/0000-0002-8324-0506)
- Ch. Mühlig
- Sven Schröder
Institutions
- Fraunhofer Institute for Applied Optics and Precision Engineering (DE)
- Friedrich Schiller University Jena (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.we.9
- Primary Topic
- Surface Roughness and Optical Measurements
- Type
- article
- Field-Weighted Citation Impact
- 0.00