Form-Birefringence in SiO2/TiO2/Al2O3 Heterostructures
Atomically thin heterostructures deposited by atomic layer deposition show strong form-birefringence as determined by ellipsometry close to theoretical values. The form-birefringence depends on the period of the heterostructures indicating partial intermixing of the constituent layers.
Authors
- Adriana Szeghalmi (ORCID: https://orcid.org/0000-0003-2055-2825)
- Jinsong Liu (ORCID: https://orcid.org/0000-0003-2114-9018)
- Sven Schröder (ORCID: https://orcid.org/0000-0001-6812-362X)
- Martin Mičulka
Institutions
- Fraunhofer Institute for Applied Optics and Precision Engineering (DE)
- Friedrich Schiller University Jena (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.mb.3
- Primary Topic
- Ferroelectric and Piezoelectric Materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00