Emerging fabrication technologies for all-dielectric periodic metastructures in coatings
The method to structure and oxidize metallic layers on glass, creating transparent oxide surfaces with periodic patterns, is presented. Sub-micrometer gratings are formed using laser interference patterning of tantalum layers, followed by thermal oxidation.
Authors
- Mindaugas Andrulevičius (ORCID: https://orcid.org/0000-0001-6290-6295)
- Tomas Tolenis (ORCID: https://orcid.org/0000-0001-5400-729X)
- Simonas Indrišiūnas (ORCID: https://orcid.org/0000-0002-2709-7063)
- Lina Grinevičiūtė (ORCID: https://orcid.org/0000-0001-8505-5067)
- Julianija Nikitina (ORCID: https://orcid.org/0009-0003-0544-3329)
Institutions
- Kaunas University of Technology (LT)
- Vilnius University (LT)
- Center for Physical Sciences and Technology (LT)
- Extreme Light Infrastructure Beamlines (CZ)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.td.5
- Primary Topic
- Copper Interconnects and Reliability
- Type
- article
- Field-Weighted Citation Impact
- 0.00