PARMS-based nanolaminates for UV-applications

We present a comparative study of Ta 2 O 5 /SiO 2 and Nb 2 O 5 /SiO 2 nanolaminates. They were fabricated using Plasma-Assisted Reactive Magnetron Sputtering. We show that these nanolaminates present an interesting alternative to classical high-refractive-index materials for UV applications. However, the lower the bandgap of the high-refractive-index material, the lower the bandgap of the nanolaminate at a given refractive index.