Recent Progress on Versatile Variable Filters Using HELIOS Reactive Magnetron Sputtering Technology

Gradient optical interference filters, in which the spectral properties shifts along a dimension of the component, are a promising way to simplify and to miniaturize imaging spectrophotometer systems. In this paper, we present a versatile method for the fabrication of variable filters with different spatial profiles based on plasma assisted reactive magnetron sputtering (PARMS) and demonstration of high performances gradient coatings and filters.