From near infra-red to the deep Ultra Violet: Low loss coatings with oxides using an Ion Beam Sputtering System

The optical performance of dielectric mirror coatings at 1064nm, 532nm, 355nm and 193nm deposited using a dual Ion Beam sputtering system are being presented and discussed.

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Publication Details

Published
2025-01-01
DOI
https://doi.org/10.1364/oic.2025.mc.7
Primary Topic
Ion-surface interactions and analysis
Type
article
Field-Weighted Citation Impact
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article

From near infra-red to the deep Ultra Violet: Low loss coatings with oxides using an Ion Beam Sputtering System

Thomas Gischkat, Isabel Vela-Pérez, Alex Ribeaud, Harro Hagedorn et al.
Ion-surface interactions and analysis
article

From near infra-red to the deep Ultra Violet: Low loss coatings with oxides using an Ion Beam Sputtering System

Thomas Gischkat, Isabel Vela-Pérez, Alex Ribeaud, Harro Hagedorn, Juergen Pistner, Ch. Mühlig, Sven Schröder
article en

Abstract

The optical performance of dielectric mirror coatings at 1064nm, 532nm, 355nm and 193nm deposited using a dual Ion Beam sputtering system are being presented and discussed.

Siemens (Germany) (DE), Fraunhofer Institute for Applied Optics and Precision Engineering (DE), Bühler (Germany) (DE)
Openalex Percentile: Top 81%
Ion-surface interactions and analysis
DOISourceOpenAlex
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