Ultra-antireflective optical coating with atomic layer deposition
Ultra-antireflective Beneq AtomGrass™ coatings were fabricated with Beneq P800 large batch ALD system achieving ultra-low average reflectance < 0.1% in wavelength range 400 - 700 nm at wide angles of incidence 7° - 40°.
Authors
- Sami Sneck
- Xiangru Guo
- John Rönn
- Mikael Saarniheimo
- Lassi Leppilahti
- Leevi Pesonen
Institutions
- Beneq (Finland) (FI)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.fb.2
- Primary Topic
- Optical Coatings and Gratings
- Type
- article
- Field-Weighted Citation Impact
- 0.00