Ultra-antireflective optical coating with atomic layer deposition

Ultra-antireflective Beneq AtomGrass™ coatings were fabricated with Beneq P800 large batch ALD system achieving ultra-low average reflectance < 0.1% in wavelength range 400 - 700 nm at wide angles of incidence 7° - 40°.

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Publication Details

Published
2025-01-01
DOI
https://doi.org/10.1364/oic.2025.fb.2
Primary Topic
Optical Coatings and Gratings
Type
article
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article

Ultra-antireflective optical coating with atomic layer deposition

Sami Sneck, Xiangru Guo, John Rönn, Mikael Saarniheimo et al.
Optical Coatings and Gratings
article

Ultra-antireflective optical coating with atomic layer deposition

Sami Sneck, Xiangru Guo, John Rönn, Mikael Saarniheimo, Lassi Leppilahti, Leevi Pesonen
article en

Abstract

Ultra-antireflective Beneq AtomGrass™ coatings were fabricated with Beneq P800 large batch ALD system achieving ultra-low average reflectance < 0.1% in wavelength range 400 - 700 nm at wide angles of incidence 7° - 40°.

Beneq (Finland) (FI)
Openalex Percentile: Top 84%
Optical Coatings and Gratings
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Ultra-antireflective optical coating with atomic layer deposition — Sami Sneck, Xiangru Guo, et al. · (2025) | TGRS Research Map | TGRS