Bandpass filters using magnetron sputtered SiO2 and a-Si for mid-IR wavelengths
Bandpass filters based on magnetron sputtered SiO 2 and a-Si are investigated. The effort is not limited to the near-IR range, but also tested for the highest possible wavelength for these materials in the mid-IR. We report on the fabrication of a bandpass filter around 3.5 μm.
Authors
- Daniel Poitras (ORCID: https://orcid.org/0000-0003-4403-8214)
- Penghui Ma (ORCID: https://orcid.org/0000-0001-8092-2029)
Institutions
- National Research Council Canada (CA)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.tb.2
- Primary Topic
- Semiconductor materials and devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00