Direct intermittent Monitoring in the DUV range
The wavelength range for direct monitoring in box coaters was extended to the DUV range. An optical path with deuterium lamp, a special designed achromatic lens system and a PMT detector was used.
Authors
- Detlef Arhilger
- A. Zöller
- Harro Hagedorn
Institutions
- Siemens (Germany) (DE)
- Bühler (Germany) (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.tc.4
- Primary Topic
- Calibration and Measurement Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00