Magnetron sputtering for high performance infrared optical coatings up to 14 μm
In the 4.5 – 14 μm infrared spectral range data of only few materials with low absorption are available. Results on sputter-deposited coatings are presented, focusing on optical properties, layer stress and environmental stability.
Authors
- Michael Vergöhl
- Florian Gebert (ORCID: https://orcid.org/0000-0003-4009-549X)
- Chris Britze
- Martin Bischoff
Institutions
- Fraunhofer Institute for Surface Engineering and Thin Films (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/oic.2025.mc.3
- Primary Topic
- Spectroscopy Techniques in Biomedical and Chemical Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00