Atomic Force Microscopy Study of the Physical Properties of Aluminum Nitride Thin Films
The results of the measurements of the roughness and longitudinal piezoelectric modulus d33 of aluminum nitride films of different thicknesses obtained by vacuum magnetron sputtering are reported. The characteristics of the synthesized films are described and atomic force microscopy images of the film surface morphology are presented. It is shown that the roughness of the obtained films decreases when a nucleation layer is formed from molybdenum and the piezoelectric moduli d33 of the two materials are similar.
Authors
- В. И. Струнин (ORCID: https://orcid.org/0000-0002-9649-9461)
- Л. В. Баранова (ORCID: https://orcid.org/0000-0001-9760-5169)
- N. A. Chirikov (ORCID: https://orcid.org/0000-0003-2920-056X)
- N. A. Davletkildeev (ORCID: https://orcid.org/0000-0002-5591-6118)
- A. Yu. Kuklev
Institutions
- Omsk State University (RU)
- Siberian Law University (RU)
- Institute of Radiophysics and Electronics (AM)
Publication Details
- Journal
- Technical Physics Letters
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1134/s1063785025700129
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00