Three‐Dimensional Electrical Capacitance Tomography Based on a Novel Planar Array Capacitance Sensor

ABSTRACT The planar electrical capacitance tomography (ECT) is a non‐destructive evaluation technology (NDE) for imaging 2D/3D permittivity distribution using capacitance measurements between electrodes on a co‐planar surface. At present, the sensitivity field distribution uniformity of the planar array sensor is poor, and the image reconstruction quality in the central region is not high. In this letter, a honeycomb‐structured sensor with a central and 60‐degree rotational symmetry is proposed to improve the uniformity of the sensitive field and enhance the sensitivity in the central region so as to improve the imaging performance.