The Influence of the Working Gas Composition on the Mass-to-Charge Composition of Ions in the Beam Plasma during the Evaporation of an YSZ Target by an Electron Beam
The paper presents the results of a study on the mass-to-charge composition of ions in the beam plasma generated during the evaporation of a solid-state ceramic target made of yttria-partially stabilized zirconia (YSZ) in an environment of inert and reactive gases by an electron beam in the forevacuum pressure range. Monitoring of the mass-to-charge composition of beam plasma ions was carried out using a modernized RGA-300 residual atmosphere mass analyzer. The influence of the working gas composition on the mass spectra of ions of the evaporated target material is shown.
Authors
- Denis B. Zolotukhin (ORCID: https://orcid.org/0000-0002-5206-9486)
- A.V. Tyunkov (ORCID: https://orcid.org/0000-0001-9742-9636)
- A. A. Andronov (ORCID: https://orcid.org/0009-0004-9120-8487)
- S. G. Salnikov (ORCID: https://orcid.org/0000-0003-0124-9900)
- Yu. G. Yushkov (ORCID: https://orcid.org/0000-0002-5762-2463)
- Aleksandr Nesterenko
- T. O. Klimkin
Institutions
- Tomsk State University of Control Systems and Radio-Electronics (RU)
Publication Details
- Journal
- Plasma Physics Reports
- Published
- 2025-03-01
- DOI
- https://doi.org/10.1134/s1063780x25602494
- Primary Topic
- Fusion materials and technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00