MEMS-based all-quartz fiber-optic sensor for simultaneously acoustic pressure and temperature measurement under 800 °C harsh environment

An all-quartz fiber-optic sensor for simultaneous measurement of acoustic pressure and temperature under 800 °C harsh environment is proposed and experimentally demonstrated. The sensor employs micro-electro-mechanical system (MEMS) based integrated manufacturing to achieve thermal stress matching of sensitive components, significantly enhancing its stability in high-temperature environments. The experimental results show that the sensor exhibits a temperature working curve fitting goodness of over 0.999 in the range of 20-822 °C, and achieves high-precision acoustic pressure measurement in the range of 120-150 dB. At temperatures above 800 °C, the peak-to-peak value drift of the sensor under acoustic pressure remains below 0.01 nm. The sensor is expected to provide a solution for simultaneous measurement of high temperature and acoustic pressure, and it has the potential to improve the accuracy of acoustic pressure measurement in high-temperature environments through temperature compensation.