Digitally-Assisted Calibration and Control of a Raster-Scanning System Based on MEMS Mirrors

This work discloses the implementation of a raster-scanning projection system based on MEMS micromirrors, including predictor-based control and an embedded recalibration feature. The system is designed to target an image of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$1280\times 720$</tex-math> </inline-formula> pixels. Two separate mirrors are used to steer a single, modulated, laser source across the screen: one, operated at its resonance frequency, performs a sinusoidal horizontal scan, while the second, operated in the quasi-static regime, performs the vertical scan. The maximum frame rate at the target resolution is 60Hz when bidirectional scanning is exploited. The amplitude and frequency errors of the horizontal scan are 18.5 mdeg and 52 ppm, respectively, while the linearity of the vertical scan is 3.4mdeg, i.e., 580ppm of the field-of-view, with a mean frame-to-frame reproducibility of 5.5 mdeg. [2025-0068]