Manufacturing Tolerances and Position Accuracy of Moving-Magnet Planar Motors

This paper concerns the position accuracy of movingmagnet planar motor geometries for which the manufacturing tolerances are taken into account. A stochastic analysis is performed in which a randomized set of 10000 tolerances is applied to each geometry and the position error is calculated for a motion profile. The 3-sigma values of the manufacturing tolerances on the individual coils and magnets are determined to achieve an accuracy in the sub 100 nm range.