A Novel Algorithm of Force Distribution to Reduce Force Coupling for the Six-Degree-of-Freedom Maglev Planar Motor

Maglev planar motors (MLPMs), as a class of six-degree-of-freedom (6-DOF) actuators, have garnered significant attention due to their potential in precision and ultra-precision manufacturing, particularly for semiconductor applications. The precise positioning of a 6-DOF MLPM is significantly affected by electromagnetic coupling and mechanical coupling. To achieve decoupled control of the 6-DOF motion, this paper proposes a force distribution algorithm that takes into account force constraints. Simulation results demonstrate that the force distribution model can effectively alter the state of one degree of freedom, thereby reducing the motion interference among other degrees of freedom.