Limiting Field Strength and Electron Transport Coefficients of TMS vapor using Boltzmann Equation Method

The electron transport parameters in TMS vapor were calculated by using two-term solution of Boltzmann equation method for the range E/N of 1-1000 Td, (1Td= 10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-17</sup> V.cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup>) at temperature 300 K. The effect of reduced field strength (E/N) on swarm parameters are studied. Calculations are in best agreement compare with previous experimental and theoretical values. Negative differential conductivity (NDC) regions have been found for each case. The EEDF, which represents the distribution of energy for electrons, was found to be non-maxwellian for the range E/N> 50 Td, at high electric field due to inelastic collision the EEDF shape tends to convex. Furthermore, limiting field strength (E/N)lim and energy lost in various inelastic collision types were also computed and analyzed over a wide range of E/N for the first time. Many industrial processes and applications might benefit from TMS vapor, particularly plasma-assisted thin-film deposition.