Artificial Intelligence (AI) Standards and QA in Semiconductor Manufacturing

Artificial Intelligence (AI) is revolutionizing semiconductor manufacturing with enhanced efficiency, quality, and fault detection. However, with the widespread application of AI, industry-standard practices are required to ensure reliability, transparency, and compliance. This paper discusses AI's role in semiconductor quality control, the need for strict standards, and manufacturing implementation issues. It explores cutting-edge applications, including federated learning, explainable AI (XAI), and simulation-based fault detection. Lastly, it provides an overview of AI standard development for semiconductor manufacturing.