Sol-gel dip-coating of yttrium oxide films with eco-friendly additives for enhanced plasma-resistant coatings

Abstract Yttrium oxide (Y 2 O 3 ) is a promising material for plasma-resistant coatings, commonly used to protect ceramic equipment in chambers for applications such as semiconductor manufacturing. This study examines the effects of five additives on Y 2 O 3 film formation via sol-gel dip-coating and evaluates their quality and plasma resistance. Lauryl dimethylaminoacetic acid (LDAAA) and Carboxymethyl cellulose sodium salt (CMC) additives were dense, pinhole-free, and exhibited plasma resistance comparable to those prepared with 2-methoxyethoxyethanol (2-MEE), a flammable substance with teratogenic toxicity. In contrast, LDAAA and CMC are safer alternatives, widely used as surfactants and thickeners in commercial products. Plasma resistance tests showed a 20-fold improvement over untreated quartz glass, highlighting their practical potential. This study demonstrates a strategy for producing high-quality, plasma-resistant Y 2 O 3 films using safer and more efficient additives.