Gas-Circulation System for Forming a Gas-Jet Target in a Vacuum Chamber of a Laser-Plasma Source

The design and operating principle of a gas-circulation system used as a target for a gas-jet laser-plasma source are described. The need for such a system is due to the desire to reduce gas consumption while maintaining the performance of the radiation source. The circulation system allows the same volume of gas to be used as a target multiple times. The article presents the design of the system as well as the results of trial operation and assessment of the tightness of the designed system and the operating time on one gas filling.