Innovative Eye-Tracking Technology Using Angled Comb Drive MEMS Mirrors: A Computational and Experimental Analysis

Eye-tracking technology captures eye movement and gaze point information by leveraging the characteristics of the human eye, using hardware devices in combination with software algorithms.It is a cutting-edge technique that can shorten the process of human-computer interaction.MEMS (Micro-Electro-Mechanical Systems) mirrors, with their low power consumption, high precision, and fast response times, can ensure the accuracy and speed required for eye tracking.In this paper, we propose an innovative design of angled comb fingers based on the traditional comb drive structure for electrostatic MEMS mirrors.Through steady-state simulations and numerical calculations, we analyze the relationships between beam length, beam width, mirror size, and resonant frequency.We also calculate the parameter relationships for traditional, serpentine, and angled comb drives.The maximum displacement generated by the oblique comb electrostatic micromirror designed in this paper is 5.18 10 -4 m, which is 3.3 times of the approximate normal comb displacement and 4.6 times of the serpentine comb displacement.Based on the scanning characteristics of electrostatic MEMS mirrors, we establish a relationship model between eye movement angle and the interval of signal peaks using geometric modeling, demonstrating a nonlinear relationship influenced by trigonometric functions.Finally, by combining theoretical and experimental methods, we discovered that the signals obtained from left and right eye movements are nearly symmetrical with respect to the 0 position.The peak spacing error brings the error value of the eye-movement angle measurement to be less than 0.1, and the experimental system achieved an eye-tracking accuracy of better than 1.Therefore, this research provides a theoretical foundation and methodological guidance for the broad application of electrostatic MEMS mirrors in the field of eye tracking.