Joule Heating Effect on Quality Factor and Frequency Tuning of 2D MoS2 NEMS Resonators
This work mainly studies the frequency and quality factor <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(Q)$</tex> tuning effect and mechanism by Joule heating in twodimensional (2D) molybdenum disulfide <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\left(\text{MoS}_{2}\right)$</tex> nanoelectromechanical systems (NEMS). We demonstrate decreased frequency and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$Q$</tex> with a larger drain voltage which contributes to stronger Joule heating. The measured tunability of Joule heating effect on <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$Q$</tex> is approximately four times the tunability of gate voltage effect on <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$Q$</tex>. The results provide insights for dissipation mechanisms in 2D NEMS resonators.
Authors
- Rui Yang (ORCID: https://orcid.org/0000-0003-3860-7206)
- Shuai Yuan (ORCID: https://orcid.org/0000-0003-3329-0481)
- Zuheng Liu (ORCID: https://orcid.org/0000-0002-1866-2649)
- Pengcheng Zhang (ORCID: https://orcid.org/0009-0002-6198-7999)
Institutions
- Shanghai Jiao Tong University (CN)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11041108
- Primary Topic
- Mechanical and Optical Resonators
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- Science and Technology Commission of Shanghai Municipality
- Natural Science Foundation of Chongqing