Piezoelectric Micromachined Ultrasonic Transducers for Advanced Sensing Applications
This paper discusses the design, optimization, and applications of piezoelectric micromachined ultrasonic transducers (PMUTs) for ultrasonic sensing systems. PMUTs offer advantages such as miniaturization, large bandwidth, and high-yield process of transducer array. Key advancements, including non-uniform membrane design and multi-frequency operation, are highlighted for their role in enhancing PMUT performance and versatility. Applications in structural health monitoring, underwater communication, and imaging are also presented.
Authors
- Junhao Wang (ORCID: https://orcid.org/0000-0002-2338-6191)
- Bowen Sheng (ORCID: https://orcid.org/0000-0001-8821-8300)
- Lei Zhao
- Yufeng Gao (ORCID: https://orcid.org/0009-0005-0612-480X)
- Chenyuan Zhang (ORCID: https://orcid.org/0000-0002-2706-4237)
- Jiao Xia
- Yipeng Lu (ORCID: https://orcid.org/0009-0006-4277-3222)
- Jinghan Gan
Institutions
- Peking University (CN)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11040271
- Citations
- 1
- Primary Topic
- Advanced Sensor and Energy Harvesting Materials
- Type
- article
- Field-Weighted Citation Impact
- 0.67