Understanding the Impact of Discrete Trap Positions and Mapping the Hysteresis Dynamics in $\text{MoS}_{2}$ FETs by Advanced TCAD Modeling

Locally increased defect densities in gate insulators, for instance due to not properly adjusted processing, could present a serious reliability problem for 2D FETs. By doing advanced TCAD modeling, here we for the first time demonstrate that hysteresis dynamics in <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{MoS}_{2}$</tex> FETs may depend on the trap position in oxide. Furthermore, we show that in some positions defects may cause a localized hysteresis of both signs and introduce the universal hysteresis mapping method to properly benchmark this behavior. Finally, we revisit previous experimental results for <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{FAB} \text{MoS}_{2}$</tex> FETs and show that our TCAD-inspired method can add more understanding to the observed hysteresis dynamics.

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Published
2025-03-09
DOI
https://doi.org/10.1109/edtm61175.2025.11041386
Primary Topic
Advancements in Semiconductor Devices and Circuit Design
Type
article
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article

Understanding the Impact of Discrete Trap Positions and Mapping the Hysteresis Dynamics in $\text{MoS}_{2}$ FETs by Advanced TCAD Modeling

Yu. Yu. Illarionov, Y.J. Chai, Yanli Lv
Advancements in Semiconductor Devices and Circuit Design
article

Understanding the Impact of Discrete Trap Positions and Mapping the Hysteresis Dynamics in $\text{MoS}_{2}$ FETs by Advanced TCAD Modeling

Yu. Yu. Illarionov, Y.J. Chai, Yanli Lv
article en

Abstract

Locally increased defect densities in gate insulators, for instance due to not properly adjusted processing, could present a serious reliability problem for 2D FETs. By doing advanced TCAD modeling, here we for the first time demonstrate that hysteresis dynamics in <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{MoS}_{2}$</tex> FETs may depend on the trap position in oxide. Furthermore, we show that in some positions defects may cause a localized hysteresis of both signs and introduce the universal hysteresis mapping method to properly benchmark this behavior. Finally, we revisit previous experimental results for <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{FAB} \text{MoS}_{2}$</tex> FETs and show that our TCAD-inspired method can add more understanding to the observed hysteresis dynamics.

Southern University of Science and Technology (CN)
National Natural Science Foundation of China, Shenzhen Science and Technology Innovation Program
Openalex Percentile: Top 87%
Advancements in Semiconductor Devices and Circuit Design
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Understanding the Impact of Discrete Trap Positions and Mapping the Hysteresis Dynamics in $\text{MoS}_{2}$ FETs by Advanced TCAD Modeling — Yu. Yu. Illarionov, Y.J. Chai, et al. · (2025) | TGRS Research Map | TGRS