Enabling Broader Memory Windows by Double-Gate Nanosheet Ferroelectric FETS for Next-Generation Non-Volatile Memory Storage

In this work, we present a novel lateral electric field-driven transistor that leverages an asymmetric double-gate nanosheet (DGNS) design to optimize the balance between ferroelectric (FE) layer scaling and memory window (MW) expansion. This device architecture, implemented through precise digital etching, defines a controllable active area together with a self-aligned etching method to facilitate the formation of the NS channels, significantly improving fabrication efficiency. The unique design separates read and write functions, by taking advantages of body effect and a high surface-to-volume ratio of channel to expand the MW without compromising electrostatic integrity. These innovations provide enhanced performance and scalability, positioning the proposed device as a viable candidate for advanced applications in next-generation electronic systems and memory storage technologies.

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Publication Details

Published
2025-03-09
DOI
https://doi.org/10.1109/edtm61175.2025.11041135
Primary Topic
Ferroelectric and Negative Capacitance Devices
Type
article
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article

Enabling Broader Memory Windows by Double-Gate Nanosheet Ferroelectric FETS for Next-Generation Non-Volatile Memory Storage

C.-J. Su, Chao‐Hsin Wu, Tung‐Yi Lin, Chien-Hao Chiu et al.
Ferroelectric and Negative Capacitance Devices
article

Enabling Broader Memory Windows by Double-Gate Nanosheet Ferroelectric FETS for Next-Generation Non-Volatile Memory Storage

C.-J. Su, Chao‐Hsin Wu, Tung‐Yi Lin, Chien-Hao Chiu, Vita Pi‐Ho Hu, Po-Cheng Su, Fang‐Iy Wu
article en

Abstract

In this work, we present a novel lateral electric field-driven transistor that leverages an asymmetric double-gate nanosheet (DGNS) design to optimize the balance between ferroelectric (FE) layer scaling and memory window (MW) expansion. This device architecture, implemented through precise digital etching, defines a controllable active area together with a self-aligned etching method to facilitate the formation of the NS channels, significantly improving fabrication efficiency. The unique design separates read and write functions, by taking advantages of body effect and a high surface-to-volume ratio of channel to expand the MW without compromising electrostatic integrity. These innovations provide enhanced performance and scalability, positioning the proposed device as a viable candidate for advanced applications in next-generation electronic systems and memory storage technologies.

National Yang Ming Chiao Tung University (TW), National Taiwan University (TW)
Affordable and clean energy
Openalex Percentile: Top 87%
Ferroelectric and Negative Capacitance Devices
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