Enabling Broader Memory Windows by Double-Gate Nanosheet Ferroelectric FETS for Next-Generation Non-Volatile Memory Storage
In this work, we present a novel lateral electric field-driven transistor that leverages an asymmetric double-gate nanosheet (DGNS) design to optimize the balance between ferroelectric (FE) layer scaling and memory window (MW) expansion. This device architecture, implemented through precise digital etching, defines a controllable active area together with a self-aligned etching method to facilitate the formation of the NS channels, significantly improving fabrication efficiency. The unique design separates read and write functions, by taking advantages of body effect and a high surface-to-volume ratio of channel to expand the MW without compromising electrostatic integrity. These innovations provide enhanced performance and scalability, positioning the proposed device as a viable candidate for advanced applications in next-generation electronic systems and memory storage technologies.
Authors
- C.-J. Su (ORCID: https://orcid.org/0009-0008-2296-8510)
- Chao‐Hsin Wu (ORCID: https://orcid.org/0000-0001-7849-773X)
- Tung‐Yi Lin (ORCID: https://orcid.org/0000-0003-1199-1121)
- Chien-Hao Chiu
- Vita Pi‐Ho Hu (ORCID: https://orcid.org/0000-0002-6216-214X)
- Po-Cheng Su (ORCID: https://orcid.org/0000-0001-9515-4894)
- Fang‐Iy Wu
Institutions
- National Yang Ming Chiao Tung University (TW)
- National Taiwan University (TW)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11041135
- Primary Topic
- Ferroelectric and Negative Capacitance Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00