Leveraging Mature Chip Manufacturing Techniques for Innovative Technology Development
This paper provides an in-depth look at the innovative advancements in chip manufacturing techniques, specifically focusing on the research and development efforts at Zhejiang ICsprout Semiconductor Co., Ltd's CMOS pilot line. The exploratory development encompasses high-reliability CMOS processes, next-generation power devices, novel embedded flash memory devices, and post-CMOS heterogeneous integration. By rethinking traditional CMOS fabrication processes, we showcase how these proven techniques can propel substantial technological progress and underscore the capabilities of a mature CMOS pilot line in improving reliability, performance, and functionality in emerging semiconductor technologies.
Authors
- Dawei Gao (ORCID: https://orcid.org/0009-0002-7786-1506)
- Dianyu Qi (ORCID: https://orcid.org/0000-0003-2912-9388)
- Yongyu Wu
- Yishu Zhang (ORCID: https://orcid.org/0009-0005-6573-2004)
- Kai‐Da Xu (ORCID: https://orcid.org/0000-0001-9408-1347)
- Yunlong Li (ORCID: https://orcid.org/0000-0001-6005-2150)
- Ran Tao (ORCID: https://orcid.org/0000-0002-6206-1744)
Institutions
- Zhejiang University (CN)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11041260
- Primary Topic
- Manufacturing Process and Optimization
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Zhejiang University