MEMS Integrated with Self-Assembled Electrets

SAEs (self-assembled electrets) are recently reported electrets that can be deposited in semiconductor manufacturing processes and, unlike conventional electrets, do not require any charging process. We have developed an integration technology of SAEs with MEMS (micro-electro-mechanical systems) for the first time and successfully demonstrated SAE-based MEMS vibrational energy harvesters. This presentation introduces the integration technology of MEMS and SAEs, the characterization of SAE films formed in MEMS devices, and SAE-MEMS co-design technologies, including future prospects.